Brooks — High Temperature Thermal

High Temperature Thermal

Series Datasheets

5850EMH Series

9861 Series

Features
  • Highest operating temperature
  • High accuracy and repeatability
  • Ultra-high purity construction

Specifications

Fluid Type
Gas, Vapor

Flow Range (Full Scale Capacity)
3 sccm – 10 slm

Accuracy
SP ±1%

Max Pressure
145 psig

Temperature
150°C

Output Type
Analog & Digital