Metal Sealed Thermal
Series Datasheets
Features
- For processes sensitive to moisture or oxygen
- High purity flow path minimizes process contamination, enhances yield
- Ultra-fast response time
Specifications
Fluid Type
Gas
Flow Range (Full Scale Capacity)
.06 sccm – 300 slm
Accuracy
SP ±1%
Max Pressure
150 psig
Temperature
50°C
Output Type
Analog & Digital
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